The introduction of several new dielectric materials for high-speed ultra-large-scale integration (ULSI) microelectronics has increased the necessity for metrology tools to measure the ...
In the field of semiconductor fabrication, high-k dielectrics represent a class of materials with a dielectric constant significantly higher than traditional silicon dioxide. These materials are ...
Just as circuit metallization must evolve to manage resistance as features shrink, so must the dielectric half of the interconnect stack. For quite some time, manufacturers have needed a dielectric ...
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