A focused ion beam scanning electron microscope (FIB-SEM) equipped with a compact time-of-flight secondary ion mass spectrometer (ToF-SIMS) 1,2 and traditional energy dispersive X-ray spectroscopy ...
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Utilizing FIB-SEM, nanofluidic lab-on-a-chip devices for the analysis of single DNA molecules were characterized and fabricated. Direct FIB nanopatterning of silicon master stamps enables the quick ...
Today's scanning electron microscopes achieve ∼2-nm spot diameters at landing energies low enough that only the top few nanometers of the block's surface contributes substantially to the acquired ...
The Hitachi FB-2000A FIB uses a beam of focused high-energy (30 kV) gallium ions to remove material in a very controlled manner from inorganic specimens. The FB-2000A is a single beam system; that is, ...
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