Unlike the electron beam used in scanning and transmission electron microscopy (SEM, TEM), the beam in a focused ion beam system (FIB) is composed of gallium (Ga) ions. The ions forming the structure ...
The Large Helical Device (LHD) and the heavy ion beam probe (HIBP) system. The inset on the left shows an enlarged view of the section from the negative ion source to the injection side of the tandem ...