What is Block Copolymer Lithography? Block copolymer lithography is a nanofabrication technique that utilizes the self-assembly properties of block copolymers to create ordered nanostructures. Block ...
High-throughput nanoscale lithographic technologies have been intensively studied and developed in relation to the upcoming 10-nm node and beyond for the improvement of semiconductor manufacturing ...
The SPIE Advanced Lithography + Patterning (AL+P) Symposium is always an informative event for lithographers, and looking at the Advance Program, it appears that AL+P 2023 will be no exception. The ...
EUV is the clear winner down to 5nm, but what comes after that may be a combination of tools and techniques. Chipmakers are ramping up extreme ultraviolet (EUV) lithography for advanced logic at 7nm ...