Abstract: In this work, trench first process integration scheme was used to develop MEMS contact module, and local surface planarization was realized by the optimized design and process control. Thin ...
The three-dimensional structure of a protein underpins its biological function, making structure determination and prediction central challenges in structural biology. Although experimental techniques ...
Abstract: In this study, we present the design, fabrication, and measurements of a 3-D heterogeneous integrated RF-module at W-band. A 3-D transition structure based on micro-bumps is fabricated and ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results